Invention Grant
- Patent Title: Prevention of substrate edge plating in a fountain plating process
- Patent Title (中): 在喷镀工艺中防止衬底边缘镀层
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Application No.: US12323157Application Date: 2008-11-25
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Publication No.: US08172989B2Publication Date: 2012-05-08
- Inventor: Thomas Pass
- Applicant: Thomas Pass
- Applicant Address: US CA San Jose
- Assignee: SunPower Corporation
- Current Assignee: SunPower Corporation
- Current Assignee Address: US CA San Jose
- Agency: Blakely Sokoloff Taylor & Zafman LLP
- Main IPC: C25D17/00
- IPC: C25D17/00
Abstract:
A plating apparatus and method for plating a surface of a substrate are described. Generally, the apparatus includes a double wall plating vessel having an inner cup and an outer cup peripherally surrounding and spaced apart from the inner cup. The inner cup has an inlet for receiving a plating solution and an outlet from which the plating solution overflows into a plenum defined between the inner and outer cups.
Public/Granted literature
- US20090134034A1 PREVENTION OF SUBSTRATE EDGE PLATING IN A FOUNTAIN PLATING PROCESS Public/Granted day:2009-05-28
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