Invention Grant
US08173039B2 Method for preparing cerium oxide powder using organic solvent and CMP slurry comprising the same
有权
使用有机溶剂制备氧化铈粉末的方法和包含该方法的CMP浆料
- Patent Title: Method for preparing cerium oxide powder using organic solvent and CMP slurry comprising the same
- Patent Title (中): 使用有机溶剂制备氧化铈粉末的方法和包含该方法的CMP浆料
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Application No.: US12312601Application Date: 2007-11-20
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Publication No.: US08173039B2Publication Date: 2012-05-08
- Inventor: Jun-Seok Nho , Myoung-Hwan Oh , Seung-Beom Cho , Jong-Pil Kim , Jang-Yul Kim
- Applicant: Jun-Seok Nho , Myoung-Hwan Oh , Seung-Beom Cho , Jong-Pil Kim , Jang-Yul Kim
- Applicant Address: KR Seoul
- Assignee: LG Chem, Ltd.
- Current Assignee: LG Chem, Ltd.
- Current Assignee Address: KR Seoul
- Agency: McKenna Long & Aldridge LLP
- Priority: KR10-2006-0114273 20061120
- International Application: PCT/KR2007/005815 WO 20071120
- International Announcement: WO2008/062978 WO 20080529
- Main IPC: C09K13/00
- IPC: C09K13/00

Abstract:
Disclosed is a method for directly preparing cerium oxide powder in a solution phase by a) mixing a cerium precursor solution with a precipitant solution to cause a reaction; and b) performing oxidation treatment of the reacted solution, wherein at least one kind of pure organic solvent containing no water is used as a solvent for the cerium precursor solution as well as the precipitant solution to thereby prepare the cerium oxide powder, the particle size of which is adjusted to 50 nm to 3 μm. Cerium oxide powder obtained from the method and CMP slurry comprising the cerium oxide powder as a polishing agent are also disclosed. The method makes it possible to prepare cerium oxide powder with an average particle size of 50 nm or greater and high crystallinity, which is difficult to prepare by the conventional wet precipitation process, by using an organic solvent as a solvent in a wet precipitation process, and the so-prepared cerium oxide powder can be used as a polishing agent for CMP slurry even without being subjected to separate heat treatment.
Public/Granted literature
- US20100044625A1 METHOD FOR PREPARING CERIUM OXIDE POWDER USING ORGANIC SOLVENT AND CMP SLURRY COMPRISING THE SAME Public/Granted day:2010-02-25
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