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US08173069B2 Ion analyzing apparatus and ion analyzing method 有权
离子分析仪和离子分析方法

Ion analyzing apparatus and ion analyzing method
Abstract:
An ion analyzing apparatus includes a sensor; a counter electrode having openings, the counter electrode being positioned so as to substantially surround the sensor; and a bias generating circuit coupled to the sensor, wherein the sensor includes quartz crystal and a pair of electrodes positioned on surface of the quartz crystal, and one of the pair of electrodes is coupled to the bias generating circuit.
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