Invention Grant
- Patent Title: Method for producing polycrystalline silicon
- Patent Title (中): 多晶硅的制造方法
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Application No.: US12159066Application Date: 2006-12-26
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Publication No.: US08173094B2Publication Date: 2012-05-08
- Inventor: Toshiharu Yamabayashi , Masahiko Hata
- Applicant: Toshiharu Yamabayashi , Masahiko Hata
- Applicant Address: JP Tokyo
- Assignee: Sumitomo Chemical Company, Limited
- Current Assignee: Sumitomo Chemical Company, Limited
- Current Assignee Address: JP Tokyo
- Agency: Birch, Stewart, Kolasch & Birch, LLP
- Priority: JP2005-374252 20051227; JP2006-147729 20060529
- International Application: PCT/JP2006/326358 WO 20061226
- International Announcement: WO2007/077957 WO 20070712
- Main IPC: C01B33/02
- IPC: C01B33/02 ; C01F3/00 ; C01F7/48 ; C01G15/00

Abstract:
The present invention provides a method for producing polycrystalline silicon. The method for producing polycrystalline silicon comprises the steps of (A), (B), and (C), (A) reducing a chlorosilane represented by the formula (1) with a metal at a temperature T1 to obtain a silicon compound; SiHnCl4-n (1) wherein n is an integer of 0 to 3, (B) transferring the silicon compound to a zone having a temperature T2, wherein T1>T2; and (C) depositing polycrystalline silicon in the zone having a temperature T2, wherein the temperature T1 is not less than 1.29 times of a melting point (Kelvin unit) of the metal, and the temperature T2 is higher than a sublimation point or boiling point of the chloride of the metal.
Public/Granted literature
- US20090136409A1 METHOD FOR PRODUCING POLYCRYSTALLINE SILICON Public/Granted day:2009-05-28
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