Invention Grant
- Patent Title: Pellicle
- Patent Title (中): 薄膜
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Application No.: US12763470Application Date: 2010-04-20
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Publication No.: US08173330B2Publication Date: 2012-05-08
- Inventor: Toru Shirasaki
- Applicant: Toru Shirasaki
- Applicant Address: JP Tokyo
- Assignee: Shin-Etsu Chemical Co., Ltd.
- Current Assignee: Shin-Etsu Chemical Co., Ltd.
- Current Assignee Address: JP Tokyo
- Agency: Kratz, Quintos & Hanson, LLP
- Priority: JP2009-106322 20090424
- Main IPC: G03F1/14
- IPC: G03F1/14
Abstract:
A pellicle is provided that includes an aluminum pellicle frame having an anodized layer on its entire surface; and a pellicle film stretched over and affixed to an end face of the pellicle frame, the anodized layer having a thickness of 4 to 8 μm.
Public/Granted literature
- US20100273097A1 PELLICLE Public/Granted day:2010-10-28
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