Invention Grant
- Patent Title: Oxime compound and resist composition containing the same
- Patent Title (中): 肟化合物和含有它的抗蚀剂组合物
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Application No.: US12506925Application Date: 2009-07-21
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Publication No.: US08173350B2Publication Date: 2012-05-08
- Inventor: Tatsuro Masuyama , Kazuhiko Hashimoto , Takashi Hiraoka , Ichiki Takemoto
- Applicant: Tatsuro Masuyama , Kazuhiko Hashimoto , Takashi Hiraoka , Ichiki Takemoto
- Applicant Address: JP Tokyo
- Assignee: Sumitomo Chemical Company, Limited
- Current Assignee: Sumitomo Chemical Company, Limited
- Current Assignee Address: JP Tokyo
- Agency: Hogan Lovells US LLP
- Priority: JP2008-193202 20080728; JP2008-316757 20081212
- Main IPC: G03F7/004
- IPC: G03F7/004 ; G03F7/039 ; C07C303/28 ; C07C309/65 ; C08F12/20

Abstract:
An oxime compound represented by the formula (I): wherein Y represents an unsubstituted or substituted n-valent C6-C14 aromatic hydrocarbon group, n represents an integer of 1 to 6, R1 represents a C1-C30 aliphatic hydrocarbon group etc., R2 represents a linear or branched chain C1-C20 aliphatic hydrocarbon group etc., W represents —CO—O— etc., Q1 and Q2 each independently represent a fluorine atom etc., Z represents a C1-C20 halogenated aliphatic hydrocarbon group etc, and the resist composition containing the same.
Public/Granted literature
- US20100021847A1 Oxime Compound and Resist Composition Containing the Same Public/Granted day:2010-01-28
Information query
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