Invention Grant
- Patent Title: Sulfonium compound
- Patent Title (中): 锍化合物
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Application No.: US12729550Application Date: 2010-03-23
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Publication No.: US08173353B2Publication Date: 2012-05-08
- Inventor: Tatsuro Masuyama , Junji Shigematsu , Hanwoo Park
- Applicant: Tatsuro Masuyama , Junji Shigematsu , Hanwoo Park
- Applicant Address: JP Tokyo
- Assignee: Sumitomo Chemical Company, Limited
- Current Assignee: Sumitomo Chemical Company, Limited
- Current Assignee Address: JP Tokyo
- Agency: Birch, Stewart, Kolasch & Birch, LLP
- Priority: JP2009-075996 20090326
- Main IPC: G03F7/004
- IPC: G03F7/004 ; C07C309/12

Abstract:
The present invention provides a sulfonium compound represented by the formula (I): wherein Q1 and Q2 each independently represent a fluorine atom or a C1-C6 perfluoroalkyl group, R1 represents a C5-C42 organic group having a β-ketoester structure and A+ represents an organic counter ion, and a chemically amplified photoresist composition comprising the above-mentioned sulfonium compound and a resin comprising a structural unit having an acid-labile group and being insoluble or poorly soluble in an aqueous alkali solution but becoming soluble in an aqueous alkali solution by the action of an acid.
Public/Granted literature
- US20100248135A1 SULFONIUM COMPOUND Public/Granted day:2010-09-30
Information query
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