Invention Grant
- Patent Title: Method and apparatus for manufacturing thin-film transistor array substrate
- Patent Title (中): 制造薄膜晶体管阵列基板的方法和装置
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Application No.: US13056971Application Date: 2009-08-03
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Publication No.: US08173457B2Publication Date: 2012-05-08
- Inventor: Hyung Sup Lee
- Applicant: Hyung Sup Lee
- Applicant Address: KR
- Assignee: JS Lighting Co., Ltd.
- Current Assignee: JS Lighting Co., Ltd.
- Current Assignee Address: KR
- Agency: The Law Offices of Andrew D. Fortney
- Agent Andrew D. Fortney
- Priority: KR10-2008-0075662 20080801
- International Application: PCT/KR2009/004321 WO 20090803
- International Announcement: WO2010/013985 WO 20100204
- Main IPC: H01L21/00
- IPC: H01L21/00

Abstract:
A method and apparatus of fabricating a thin film transistor array substrate is disclosed, which is capable of reducing fabrication time owing to a simplified fabrication process, wherein at least one of steps for forming a gate pattern, forming a semiconductor pattern, forming a data pattern, removing an ohmic contact layer pattern exposed between source and drain electrode patterns, and forming a conductive layer pattern is performed by a laser scribing process.
Public/Granted literature
- US20110143470A1 Method and Apparatus for Manufacturing Thin-Film Transistor Array Substrate Public/Granted day:2011-06-16
Information query
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