Invention Grant
US08173457B2 Method and apparatus for manufacturing thin-film transistor array substrate 有权
制造薄膜晶体管阵列基板的方法和装置

  • Patent Title: Method and apparatus for manufacturing thin-film transistor array substrate
  • Patent Title (中): 制造薄膜晶体管阵列基板的方法和装置
  • Application No.: US13056971
    Application Date: 2009-08-03
  • Publication No.: US08173457B2
    Publication Date: 2012-05-08
  • Inventor: Hyung Sup Lee
  • Applicant: Hyung Sup Lee
  • Applicant Address: KR
  • Assignee: JS Lighting Co., Ltd.
  • Current Assignee: JS Lighting Co., Ltd.
  • Current Assignee Address: KR
  • Agency: The Law Offices of Andrew D. Fortney
  • Agent Andrew D. Fortney
  • Priority: KR10-2008-0075662 20080801
  • International Application: PCT/KR2009/004321 WO 20090803
  • International Announcement: WO2010/013985 WO 20100204
  • Main IPC: H01L21/00
  • IPC: H01L21/00
Method and apparatus for manufacturing thin-film transistor array substrate
Abstract:
A method and apparatus of fabricating a thin film transistor array substrate is disclosed, which is capable of reducing fabrication time owing to a simplified fabrication process, wherein at least one of steps for forming a gate pattern, forming a semiconductor pattern, forming a data pattern, removing an ohmic contact layer pattern exposed between source and drain electrode patterns, and forming a conductive layer pattern is performed by a laser scribing process.
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