Invention Grant
US08173458B2 Method for forming quantum well structure and method for manufacturing semiconductor light emitting element 有权
用于形成量子阱结构的方法和用于制造半导体发光元件的方法

Method for forming quantum well structure and method for manufacturing semiconductor light emitting element
Abstract:
A method for forming a quantum well structure that can reduce the variation in the In composition in the thickness direction of a well layer and a method for manufacturing a semiconductor light emitting element are provided. In a step of forming a quantum well structure (active layer) by alternately growing barrier layers and well layers on a primary surface of a GaN substrate, the well layers are each formed by growing InGaN, the barrier layers are each grown at a first temperature, the well layers are each grown at a second temperature which is lower than that of the first temperature, and when the well layers are each formed, before a starting material gas for Ga (trimethylgallium) is supplied, a starting material gas for In is supplied.
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