Invention Grant
US08173458B2 Method for forming quantum well structure and method for manufacturing semiconductor light emitting element
有权
用于形成量子阱结构的方法和用于制造半导体发光元件的方法
- Patent Title: Method for forming quantum well structure and method for manufacturing semiconductor light emitting element
- Patent Title (中): 用于形成量子阱结构的方法和用于制造半导体发光元件的方法
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Application No.: US12417857Application Date: 2009-04-03
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Publication No.: US08173458B2Publication Date: 2012-05-08
- Inventor: Yohei Enya , Yusuke Yoshizumi , Masaki Ueno , Fumitake Nakanishi
- Applicant: Yohei Enya , Yusuke Yoshizumi , Masaki Ueno , Fumitake Nakanishi
- Applicant Address: JP Osaka-shi
- Assignee: Sumitomo Electric Industries, Ltd.
- Current Assignee: Sumitomo Electric Industries, Ltd.
- Current Assignee Address: JP Osaka-shi
- Agency: Venable LLP
- Agent Michael A. Sartori; Michael E. Nelson
- Priority: JP2008-101781 20080409
- Main IPC: H01L21/00
- IPC: H01L21/00

Abstract:
A method for forming a quantum well structure that can reduce the variation in the In composition in the thickness direction of a well layer and a method for manufacturing a semiconductor light emitting element are provided. In a step of forming a quantum well structure (active layer) by alternately growing barrier layers and well layers on a primary surface of a GaN substrate, the well layers are each formed by growing InGaN, the barrier layers are each grown at a first temperature, the well layers are each grown at a second temperature which is lower than that of the first temperature, and when the well layers are each formed, before a starting material gas for Ga (trimethylgallium) is supplied, a starting material gas for In is supplied.
Public/Granted literature
- US08124430B2 Method for forming quantum well structure and method for manufacturing semiconductor light emitting element Public/Granted day:2012-02-28
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