Invention Grant
US08173472B2 Semiconductor sensor and manufacturing method of sensor body for semiconductor sensor
有权
半导体传感器半导体传感器及传感器体的制造方法
- Patent Title: Semiconductor sensor and manufacturing method of sensor body for semiconductor sensor
- Patent Title (中): 半导体传感器半导体传感器及传感器体的制造方法
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Application No.: US13012172Application Date: 2011-01-24
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Publication No.: US08173472B2Publication Date: 2012-05-08
- Inventor: Tsutomu Sawai , Kazuya Komori
- Applicant: Tsutomu Sawai , Kazuya Komori
- Applicant Address: JP Toyama-shi
- Assignee: Hokuriku Electric Industry Co., Ltd.
- Current Assignee: Hokuriku Electric Industry Co., Ltd.
- Current Assignee Address: JP Toyama-shi
- Agency: Rankin, Hill & Clark LLP
- Priority: JP2005-366607 20051220
- Main IPC: H01L21/00
- IPC: H01L21/00

Abstract:
A semiconductor sensor of which the thickness may be reduced and a method of manufacturing a sensor body for the semiconductor sensor are provided. A total length L1 of a weight portion 5 and an additional weight portion 3 as measured in an extending direction of a centerline C is determined to be shorter than a length L2 of a support portion 7 as measured in the extending direction of the centerline C. The weight portion 5 and the additional weight portion 3 are received within a space 15 defined, being surrounded by the support portion 7. Then, dimensions and shapes of the weight portion 5 and the additional weight portion 3 are determined to allow the weight portion 5 and the additional weight portion 3 to move within the space 15.
Public/Granted literature
- US20110117689A1 SEMICONDUCTOR SENSOR AND MANUFACTURING METHOD OF SENSOR BODY FOR SEMICONDUCTOR SENSOR Public/Granted day:2011-05-19
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