Invention Grant
US08173472B2 Semiconductor sensor and manufacturing method of sensor body for semiconductor sensor 有权
半导体传感器半导体传感器及传感器体的制造方法

Semiconductor sensor and manufacturing method of sensor body for semiconductor sensor
Abstract:
A semiconductor sensor of which the thickness may be reduced and a method of manufacturing a sensor body for the semiconductor sensor are provided. A total length L1 of a weight portion 5 and an additional weight portion 3 as measured in an extending direction of a centerline C is determined to be shorter than a length L2 of a support portion 7 as measured in the extending direction of the centerline C. The weight portion 5 and the additional weight portion 3 are received within a space 15 defined, being surrounded by the support portion 7. Then, dimensions and shapes of the weight portion 5 and the additional weight portion 3 are determined to allow the weight portion 5 and the additional weight portion 3 to move within the space 15.
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