Invention Grant
- Patent Title: Laser system for processing solar wafers in a carrier
- Patent Title (中): 用于在载体中处理太阳能晶片的激光系统
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Application No.: US12891525Application Date: 2010-09-27
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Publication No.: US08173473B2Publication Date: 2012-05-08
- Inventor: Derek Aqui , Steven M. Zuniga , Venkateswaran Subbaraman , Kirk Liebscher , John Alexander , Zhenhua Zhang , Virendra V. S. Rana
- Applicant: Derek Aqui , Steven M. Zuniga , Venkateswaran Subbaraman , Kirk Liebscher , John Alexander , Zhenhua Zhang , Virendra V. S. Rana
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Patterson & Sheridan, LLP
- Main IPC: H01L21/00
- IPC: H01L21/00
Abstract:
An apparatus and method for processing the solar cell substrates is provided. In one embodiment, a laser firing chamber for processing solar cell substrates placed in a carrier, comprising a laser module located at a side of the carrier, the laser module being adapted to generate and direct multiple laser beams over an entire surface of a plurality of solar cell substrates, and a transport adapted to convey the carrier through an outputting region of the laser beams.
Public/Granted literature
- US20110076847A1 LASER SYSTEM FOR PROCESSING SOLAR WAFERS IN A CARRIER Public/Granted day:2011-03-31
Information query
IPC分类:
