Invention Grant
US08173477B2 Isolation chamber and method of using the isolation chamber to make solar cell material 有权
隔离室和使用隔离室制造太阳能电池材料的方法

Isolation chamber and method of using the isolation chamber to make solar cell material
Abstract:
Apparatuses and methods are provided for the continuous formation of solar cell material including an isolation chamber that reduces cross contamination between adjacent formation zones that are at different pressures.
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