Invention Grant
- Patent Title: Thin film deposition apparatus and method of manufacturing organic light-emitting display device by using thin film deposition apparatus
- Patent Title (中): 薄膜沉积装置及使用薄膜沉积装置制造有机发光显示装置的方法
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Application No.: US12962910Application Date: 2010-12-08
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Publication No.: US08173481B2Publication Date: 2012-05-08
- Inventor: Chang-Soon Ji , Tae-Seung Kim , Jong-Woo Lee , Chengguo An
- Applicant: Chang-Soon Ji , Tae-Seung Kim , Jong-Woo Lee , Chengguo An
- Applicant Address: KR Yongin
- Assignee: Samsung Mobile Display Co., Ltd.
- Current Assignee: Samsung Mobile Display Co., Ltd.
- Current Assignee Address: KR Yongin
- Agency: Christie, Parker & Hale, LLP
- Priority: KR10-2009-0125029 20091215
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L51/40
Abstract:
A thin film deposition apparatus to remove static electricity generated between a substrate and a mask, and a method of manufacturing an organic light-emitting display device using the thin film deposition apparatus.
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