Invention Grant
- Patent Title: Method for manufacturing a semiconductor pressure sensor
- Patent Title (中): 半导体压力传感器的制造方法
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Application No.: US12163110Application Date: 2008-06-27
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Publication No.: US08173513B2Publication Date: 2012-05-08
- Inventor: Flavio Francesco Villa , Gabriele Barlocchi , Pietro Corona , Benedetto Vigna , Lorenzo Baldo
- Applicant: Flavio Francesco Villa , Gabriele Barlocchi , Pietro Corona , Benedetto Vigna , Lorenzo Baldo
- Applicant Address: IT Agrate Brianza
- Assignee: STMicroelectronics S.r.l.
- Current Assignee: STMicroelectronics S.r.l.
- Current Assignee Address: IT Agrate Brianza
- Agency: Seed IP Law Group PLLC
- Priority: EP04425197 20040319
- Main IPC: H01L21/76
- IPC: H01L21/76

Abstract:
Method for manufacturing a semiconductor pressure sensor, wherein, in a silicon substrate, trenches are dug and delimit walls; a closing layer is epitaxially grown, that closes the trenches at the top and forms a suspended membrane; a heat treatment is performed so as to cause migration of the silicon of the walls and to form a closed cavity underneath the suspended membrane; and structures are formed for transducing the deflection of the suspended membrane into electrical signals.
Public/Granted literature
- US20080261345A1 METHOD FOR MANUFACTURING A SEMICONDUCTOR PRESSURE SENSOR Public/Granted day:2008-10-23
Information query
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