Invention Grant
US08173513B2 Method for manufacturing a semiconductor pressure sensor 有权
半导体压力传感器的制造方法

Method for manufacturing a semiconductor pressure sensor
Abstract:
Method for manufacturing a semiconductor pressure sensor, wherein, in a silicon substrate, trenches are dug and delimit walls; a closing layer is epitaxially grown, that closes the trenches at the top and forms a suspended membrane; a heat treatment is performed so as to cause migration of the silicon of the walls and to form a closed cavity underneath the suspended membrane; and structures are formed for transducing the deflection of the suspended membrane into electrical signals.
Public/Granted literature
Information query
Patent Agency Ranking
0/0