Invention Grant
- Patent Title: Method of forming conductive layer and semiconductor device
- Patent Title (中): 形成导电层和半导体器件的方法
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Application No.: US12634619Application Date: 2009-12-09
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Publication No.: US08173542B2Publication Date: 2012-05-08
- Inventor: Takashi Sakaki
- Applicant: Takashi Sakaki
- Applicant Address: JP Tokyo
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP Tokyo
- Agency: Fitzpatrick, Cella, Harper & Scinto
- Priority: JP2008-333866 20081226
- Main IPC: H01L23/52
- IPC: H01L23/52

Abstract:
Provided are a method of forming a conductive layer on an inner portion of a through-electrode in which uniform adhesion property of plating in the inner portion of a through-hole is enhanced and a tact time is short, and a semiconductor device. The method of forming a conductive layer includes: a first plating step of forming a first plating layer on the inner portion of the through-hole; a plating suppression layer forming step of forming a plating suppression layer including a material different from a material of the first plating layer in an opening portion of the through-hole after the first plating step; and a second plating step of forming a second plating layer by plating on the inner portion of the through-hole after the plating suppression layer forming step.
Public/Granted literature
- US20100164122A1 METHOD OF FORMING CONDUCTIVE LAYER AND SEMICONDUCTOR DEVICE Public/Granted day:2010-07-01
Information query
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