Invention Grant
- Patent Title: Method of fabricating an identification mark utilizing a liquid film assisted by a laser
- Patent Title (中): 使用由激光辅助的液膜制造识别标记的方法
-
Application No.: US12462441Application Date: 2009-08-04
-
Publication No.: US08173552B2Publication Date: 2012-05-08
- Inventor: George P. Vakanas , Sergei L. Voronov , Luey Chon Ng , George E. Malouf
- Applicant: George P. Vakanas , Sergei L. Voronov , Luey Chon Ng , George E. Malouf
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Agent Kathy J. Ortiz
- Main IPC: H01L21/31
- IPC: H01L21/31 ; H01L23/544 ; A61N5/00
Abstract:
Methods of forming a microelectronic structure are described. Embodiments of those methods include forming a liquid on a region of a die, and then forming an identification mark through the liquid on the die.
Public/Granted literature
- US20110031590A1 Liquid film assisted laser die marking and structures formed thereby Public/Granted day:2011-02-10
Information query
IPC分类:
