Invention Grant
US08173952B2 Arrangement for producing electromagnetic radiation and method for operating said arrangement
有权
用于产生电磁辐射的装置和用于操作所述装置的方法
- Patent Title: Arrangement for producing electromagnetic radiation and method for operating said arrangement
- Patent Title (中): 用于产生电磁辐射的装置和用于操作所述装置的方法
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Application No.: US12373313Application Date: 2007-07-11
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Publication No.: US08173952B2Publication Date: 2012-05-08
- Inventor: Marco Erler
- Applicant: Marco Erler
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss Industrielle Messtechnik GmbH
- Current Assignee: Carl Zeiss Industrielle Messtechnik GmbH
- Current Assignee Address: DE Oberkochen
- Agent Laurence A. Greenberg; Werner H. Stemer; Ralph E. Locher
- Priority: DE102006032607U 20060711
- International Application: PCT/EP2007/006163 WO 20070711
- International Announcement: WO2008/006569 WO 20080117
- Main IPC: G01D18/00
- IPC: G01D18/00 ; G03B11/00

Abstract:
A method for operating an assembly configured to produce electromagnetic radiation, especially X-ray radiation or extreme ultraviolet radiation. Particles, especially electrons, are guided onto a target by way of an adjustable focusing device. The particles produce electromagnetic radiation in the target. At least one object, especially a calibration object, is penetrated by the electromagnetic radiation and a radiogram of the object is recorded. The radiogram or a plurality of radiograms is automatically evaluated and the focusing device is adjusted depending on the evaluation.
Public/Granted literature
- US20090242744A1 ARRANGEMENT FOR PRODUCING ELECTROMAGNETIC RADIATION AND METHOD FOR OPERATING SAID ARRANGEMENT Public/Granted day:2009-10-01
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