Invention Grant
US08173952B2 Arrangement for producing electromagnetic radiation and method for operating said arrangement 有权
用于产生电磁辐射的装置和用于操作所述装置的方法

  • Patent Title: Arrangement for producing electromagnetic radiation and method for operating said arrangement
  • Patent Title (中): 用于产生电磁辐射的装置和用于操作所述装置的方法
  • Application No.: US12373313
    Application Date: 2007-07-11
  • Publication No.: US08173952B2
    Publication Date: 2012-05-08
  • Inventor: Marco Erler
  • Applicant: Marco Erler
  • Applicant Address: DE Oberkochen
  • Assignee: Carl Zeiss Industrielle Messtechnik GmbH
  • Current Assignee: Carl Zeiss Industrielle Messtechnik GmbH
  • Current Assignee Address: DE Oberkochen
  • Agent Laurence A. Greenberg; Werner H. Stemer; Ralph E. Locher
  • Priority: DE102006032607U 20060711
  • International Application: PCT/EP2007/006163 WO 20070711
  • International Announcement: WO2008/006569 WO 20080117
  • Main IPC: G01D18/00
  • IPC: G01D18/00 G03B11/00
Arrangement for producing electromagnetic radiation and method for operating said arrangement
Abstract:
A method for operating an assembly configured to produce electromagnetic radiation, especially X-ray radiation or extreme ultraviolet radiation. Particles, especially electrons, are guided onto a target by way of an adjustable focusing device. The particles produce electromagnetic radiation in the target. At least one object, especially a calibration object, is penetrated by the electromagnetic radiation and a radiogram of the object is recorded. The radiogram or a plurality of radiograms is automatically evaluated and the focusing device is adjusted depending on the evaluation.
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