Invention Grant
- Patent Title: Laser irradiation apparatus and laser irradiation method
- Patent Title (中): 激光照射装置和激光照射方法
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Application No.: US11861456Application Date: 2007-09-26
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Publication No.: US08173977B2Publication Date: 2012-05-08
- Inventor: Koichiro Tanaka
- Applicant: Koichiro Tanaka
- Applicant Address: JP Kanagawa-ken
- Assignee: Semiconductor Energy Laboratory Co., Ltd.
- Current Assignee: Semiconductor Energy Laboratory Co., Ltd.
- Current Assignee Address: JP Kanagawa-ken
- Agency: Nixon Peabody LLP
- Agent Jeffrey L. Costellia
- Priority: JP2006-271363 20061003
- Main IPC: G21G5/00
- IPC: G21G5/00

Abstract:
It is an object of the present invention to provide a laser irradiation apparatus and a laser irradiation method that increase energy intensity distribution in a region having low energy intensity distribution in an end region in a major-axis direction of laser light, in performing laser irradiation. In irradiating an irradiation surface with laser light, laser light oscillated from a laser oscillator is converged in one direction through an optical element. The laser light which passes through the optical element and which is converged in one direction passes through a means which shields an end region in a major-axis direction of the laser light. Accordingly, a region where energy intensity distribution is precipitously high in the end region in the major-axis direction of the laser light can be formed in the irradiation surface.
Public/Granted literature
- US20080081298A1 LASER IRRADIATION APPARATUS AND LASER IRRADIATION METHOD Public/Granted day:2008-04-03
Information query
IPC分类:
G | 物理 |
G21 | 核物理;核工程 |
G21G | 化学元素的转变;放射源 |
G21G5/00 | 通过化学反应进行化学元素的推断转变 |