Invention Grant
US08173979B2 Generating and visualizing an ion beam profile 有权
产生和可视化离子束分布

Generating and visualizing an ion beam profile
Abstract:
A method for generating and visualizing an ion beam profile is provided. The method includes specifying an incidence direction of a particle beam, specifying a target region that is to be irradiated by said particle beam, creating an ion beam profile from points that are located on a downstream side of the target region or that are located in front of the target region and project onto the contour of the target region with respect to the incidence direction, and displaying a graphical representation of the ion beam profile.
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