Invention Grant
US08174028B2 Semiconductor composite apparatus, LED, LED printhead, and image forming apparatus 有权
半导体复合设备,LED,LED打印头和成像设备

Semiconductor composite apparatus, LED, LED printhead, and image forming apparatus
Abstract:
A semiconductor composite apparatus includes a substrate and a planarizing layer, and a semiconductor thin film. The planarizing layer is formed on the substrate either directly or indirectly. The planarizing layer includes a first surface that faces the substrate, and a second surface that is on the side of the planarizing layer remote from the substrate. The semiconductor thin film formed on the planarizing layer. The second surface has a roughness of not more than 5 nm.
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