Invention Grant
US08174050B2 Structure of a pHEMT transistor capable of nanosecond switching
有权
能够进行纳秒切换的pHEMT晶体管的结构
- Patent Title: Structure of a pHEMT transistor capable of nanosecond switching
- Patent Title (中): 能够进行纳秒切换的pHEMT晶体管的结构
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Application No.: US12643088Application Date: 2009-12-21
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Publication No.: US08174050B2Publication Date: 2012-05-08
- Inventor: Timothy E. Boles , Andrew K. Freeston , Costas D. Varmazis
- Applicant: Timothy E. Boles , Andrew K. Freeston , Costas D. Varmazis
- Applicant Address: US MA Lowell
- Assignee: M/A-COM Technology Solutions Holdings, Inc.
- Current Assignee: M/A-COM Technology Solutions Holdings, Inc.
- Current Assignee Address: US MA Lowell
- Agent Christopher P. Maiorana, PC
- Main IPC: H01L29/778
- IPC: H01L29/778 ; H01L21/338

Abstract:
A method for fabricating a transistor and the resulting transistor is disclosed. The method generally includes steps (A) to (E). Step (A) may form a high mobility layer. The high mobility layer is generally configured to carry a two-dimensional electron gas. Step (B) may form a planar layer on the high mobility layer. Step (C) may form a barrier layer on the planar layer. Step (D) may form a doped layer on the barrier layer. The doped layer is generally a low bandgap III-V semiconductor. Step (E) may form a gate in contact with the doped layer. The gate may be separated from both a source and a drain by corresponding ungated recess regions. The high mobility layer, the planar layer, the barrier layer, the doped layer, the source, the gate and the drain are generally configured as a pseudomorphic high electron mobility transistor.
Public/Granted literature
- US20110147797A1 STRUCTURE OF A pHEMT TRANSISTOR CAPABLE OF NANOSECOND SWITCHING Public/Granted day:2011-06-23
Information query
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