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US08174059B2 Multicolor photodiode array and method of manufacturing 有权
多色光电二极管阵列及其制造方法

Multicolor photodiode array and method of manufacturing
Abstract:
Novel structures of the photodetector having broad spectral ranges detection capability are provided. The photodetector offers high quantum efficiency>95% over wide spectral ranges, high frequency response>10 GHz (@3 dB). The photodiode array of N×N (or M×N) elements is also provided. The array also offers wide spectral detection ranges ultraviolet to 2500 nm with high quantum efficiency>95% and high frequency response of >10 GHz, cross-talk of
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