Invention Grant
US08174082B2 Micromechanical component having multiple caverns, and manufacturing method
失效
具有多个洞穴的微机械部件及其制造方法
- Patent Title: Micromechanical component having multiple caverns, and manufacturing method
- Patent Title (中): 具有多个洞穴的微机械部件及其制造方法
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Application No.: US11628100Application Date: 2005-04-28
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Publication No.: US08174082B2Publication Date: 2012-05-08
- Inventor: Frank Fischer , Eckhard Graf , Heiko Stahl , Hartmut Kueppers , Roland Scheuerer
- Applicant: Frank Fischer , Eckhard Graf , Heiko Stahl , Hartmut Kueppers , Roland Scheuerer
- Applicant Address: DE Stuttgart
- Assignee: Robert Bosch GmbH
- Current Assignee: Robert Bosch GmbH
- Current Assignee Address: DE Stuttgart
- Agency: Kenyon & Kenyon LLP
- Priority: DE102004027501 20040604
- International Application: PCT/EP2005/051917 WO 20050428
- International Announcement: WO2005/118463 WO 20051215
- Main IPC: H01L27/14
- IPC: H01L27/14
Abstract:
A micromechanical component having at least two caverns is provided, the caverns being delimited by the micromechanical component and a cap, and the caverns having different internal atmospheric pressures. The micromechanical component and cap are hermetically joined to one another at a first specifiable atmospheric pressure, then an access to at least one cavern is produced, and subsequently the access is hermetically closed off at a second specifiable atmospheric pressure.
Public/Granted literature
- US20080136000A1 Micromechanical Component Having Multiple Caverns, and Manufacturing Method Public/Granted day:2008-06-12
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