Invention Grant
US08174083B1 Dual-suspension system for MEMS-based devices 有权
用于基于MEMS的设备的双悬架系统

Dual-suspension system for MEMS-based devices
Abstract:
A dual-suspension system for MEMS-based devices includes a proof mass, an upper spring system, and a lower spring system. The proof mass is formed from a handle wafer, a first layer of silicon coupled to one side of the handle wafer, and a second layer of silicon coupled to the other side of the handle wafer. The upper spring system is formed from the first layer of silicon and the lower spring system is formed from the second layer of silicon. The upper and lower spring systems comprise one or more springs extending from the proof mass. The springs may be spaced at even intervals along the perimeter of the proof mass, may be symmetric or out of phase with each other, may comprise different geometries, and may be curved in shape. The upper and lower spring systems are coupled to a support structure that surrounds the proof mass.
Information query
Patent Agency Ranking
0/0