Invention Grant
- Patent Title: Electrostatic actuator apparatus
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Application No.: US12817336Application Date: 2010-06-17
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Publication No.: US08174306B2Publication Date: 2012-05-08
- Inventor: Tamio Ikehashi
- Applicant: Tamio Ikehashi
- Applicant Address: JP Tokyo
- Assignee: Kabushiki Kaisha Toshiba
- Current Assignee: Kabushiki Kaisha Toshiba
- Current Assignee Address: JP Tokyo
- Agency: Turocy & Watson, LLP
- Priority: JP2010-031820 20100216
- Main IPC: G05F1/10
- IPC: G05F1/10 ; H01G5/00

Abstract:
According to one embodiment, an electrostatic actuator apparatus includes a first voltage generation circuit configured to generate a first voltage, a first switch connected between the first voltage generation circuit and a first node, a second voltage generation circuit configured to generate a second voltage, a second switch connected between the second voltage generation circuit and a second node, a capacitor connected between the first node and the second node, an electrostatic actuator having a drive electrode connected to the first node, and a control circuit configured to perform an operation of sequentially turning on the first switch, turning off the first switch and turning on the second switch when the electrostatic actuator is driven.
Public/Granted literature
- US20110199147A1 ELECTROSTATIC ACTUATOR APPARATUS Public/Granted day:2011-08-18
Information query
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