Invention Grant
US08174751B2 Two frequency resonantly excited MEMS mirror for diode-laser marker
有权
用于二极管激光标记的双频共振激光MEMS镜
- Patent Title: Two frequency resonantly excited MEMS mirror for diode-laser marker
- Patent Title (中): 用于二极管激光标记的双频共振激光MEMS镜
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Application No.: US13085345Application Date: 2011-04-12
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Publication No.: US08174751B2Publication Date: 2012-05-08
- Inventor: John H. Jerman
- Applicant: John H. Jerman
- Applicant Address: US CA Santa Clara
- Assignee: Coherent, Inc.
- Current Assignee: Coherent, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Morrison & Foerster LLP
- Main IPC: G02B26/08
- IPC: G02B26/08

Abstract:
Apparatus for marking a bitmap image on tape includes a scanning mirror which is incorporated in a micro-electro-mechanical system (MEMS). The MEMS is torsionally resonant at two frequencies one being about three time the other. The MEMS is excited to resonance by applying an AC signal to the actuators, causing the mirror to oscillate. The AC signal has components at the two frequencies. The magnitude and phase-relationship of the components can be selected such that the mirror oscillates in an approximation of a triangle-wave.
Public/Granted literature
- US20110188103A1 TWO FREQUENCY RESONANTLY EXCITED MEMS MIRROR FOR DIODE-LASER MARKER Public/Granted day:2011-08-04
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