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US08174757B2 Wavelength determining apparatus, method and program for thin film thickness monitoring light 失效
用于薄膜厚度监测光的波长确定装置,方法和程序

Wavelength determining apparatus, method and program for thin film thickness monitoring light
Abstract:
A multi-layer optical thin film filter comprising plural deposited optical thin films, wherein optical thin film thickness for each of said optical thin films has a predetermined wavelength spectrum in a predetermined gain equalization band and a predetermined wavelength spectrum in a pumping light transmission band other than said gain equalization band.
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