Invention Grant
US08175738B2 Device manufacturing apparatus and device manufacturing method 有权
装置制造装置及装置制造方法

Device manufacturing apparatus and device manufacturing method
Abstract:
An apparatus for manufacturing a device comprises a processing unit configured to perform a process for manufacturing the device, a conveying unit configured to convey an article to the processing unit, and a controller configured to control the conveying unit based on a job queue. Information for controlling conveyance of an article for a job next to a job for which the processing unit is performing the process is registered in the job queue. The controller is configured to control the conveying unit so as to convey the article for the next job in advance, based on the information.
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