Invention Grant
- Patent Title: Device manufacturing apparatus and device manufacturing method
- Patent Title (中): 装置制造装置及装置制造方法
-
Application No.: US12207903Application Date: 2008-09-10
-
Publication No.: US08175738B2Publication Date: 2012-05-08
- Inventor: Toshio Yabe , Satoshi Sugiura
- Applicant: Toshio Yabe , Satoshi Sugiura
- Applicant Address: JP Tokyo
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP Tokyo
- Agency: Canon U.S.A., Inc. IP Division
- Priority: JP2007-240180 20070914
- Main IPC: G06F19/00
- IPC: G06F19/00

Abstract:
An apparatus for manufacturing a device comprises a processing unit configured to perform a process for manufacturing the device, a conveying unit configured to convey an article to the processing unit, and a controller configured to control the conveying unit based on a job queue. Information for controlling conveyance of an article for a job next to a job for which the processing unit is performing the process is registered in the job queue. The controller is configured to control the conveying unit so as to convey the article for the next job in advance, based on the information.
Public/Granted literature
- US20090075209A1 DEVICE MANUFACTURING APPARATUS AND DEVICE MANUFACTURING METHOD Public/Granted day:2009-03-19
Information query