Invention Grant
US08176624B2 Optical alignment module utilizing transparent reticle to facilitate tool calibration during high temperature process 有权
光学对准模块利用透明掩模以促进高温过程中的刀具校准

Optical alignment module utilizing transparent reticle to facilitate tool calibration during high temperature process
Abstract:
An apparatus and method for aligning one or more components while attaching the component to a substrate. The component is positioned over the substrate. An alignment tool is attachable to the component. The alignment tool includes a tool alignment element, an optical tool, and a substrate alignment element attached to the substrate. The tool alignment element being alignable with the substrate alignment element such that the components are positioned at specified locations on the substrate for attachment to the substrate. Further, in the method according to the disclosure, the tool alignment element aligning with the substrate alignment element to position one or more components at a specified location on the substrate.
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