Invention Grant
- Patent Title: Piezoelectric sensor and sensing instrument
- Patent Title (中): 压电传感器和传感仪器
-
Application No.: US12454518Application Date: 2009-05-19
-
Publication No.: US08176773B2Publication Date: 2012-05-15
- Inventor: Junichiro Yamakawa , Kazuo Akaike , Takeru Mutoh , Hiroyuki Kukita
- Applicant: Junichiro Yamakawa , Kazuo Akaike , Takeru Mutoh , Hiroyuki Kukita
- Applicant Address: JP Tokyo
- Assignee: Nihon Dempa Kogyo Co., Ltd.
- Current Assignee: Nihon Dempa Kogyo Co., Ltd.
- Current Assignee Address: JP Tokyo
- Agency: Jordan and Hamburg LLP
- Priority: JP2008-131450 20080520
- Main IPC: G01N29/036
- IPC: G01N29/036 ; H01L41/047

Abstract:
To provide a piezoelectric sensor in which a first electrode for measurement and a second electrode for reference are provided apart from each other on one surface side of a piezoelectric piece and a common electrode is provided on an opposite surface side so as to face the first and second electrodes. A piezoelectric sensor includes: a first electrode for measurement and a second electrode for reference provided apart from each other on one surface side of a piezoelectric piece; a common electrode provided on an opposite surface side of the piezoelectric piece commonly for the first electrode and the second electrode to face the first electrode and the second electrode; and an adsorption layer formed on an area, of the common electrode, to which the first electrode is faced across the piezoelectric piece, to adsorb a substance to be sensed.
Public/Granted literature
- US20090288488A1 PIEZOELECTRIC SENSOR AND SENSING INSTRUMENT Public/Granted day:2009-11-26
Information query