Invention Grant
- Patent Title: Gas sensor and manufacturing method thereof
- Patent Title (中): 气体传感器及其制造方法
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Application No.: US12846562Application Date: 2010-07-29
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Publication No.: US08178157B2Publication Date: 2012-05-15
- Inventor: Bee-Yu Wei , Hong-Jen Lai , Pi-Guey Su , Ren-Jang Wu , Hong-Ming Lin , Yi-Lu Sun
- Applicant: Bee-Yu Wei , Hong-Jen Lai , Pi-Guey Su , Ren-Jang Wu , Hong-Ming Lin , Yi-Lu Sun
- Applicant Address: TW Hsinchu
- Assignee: Industrial Technology Research Institute
- Current Assignee: Industrial Technology Research Institute
- Current Assignee Address: TW Hsinchu
- Agency: Thomas|Kayden
- Priority: TW92123548A 20030827
- Main IPC: B05D5/12
- IPC: B05D5/12
Abstract:
A gas sensor and manufacturing method thereof. The gas sensor includes a substrate, a pair of electrodes disposed on the substrate, and a gas sensing thin film covering the electrodes, the gas sensing thin film is made up of carbon nanotubes and tin oxide.
Public/Granted literature
- US20100310792A1 Gas Sensor and Manufacturing Method Thereof Public/Granted day:2010-12-09
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