Invention Grant
- Patent Title: Magnetic sensor and manufacturing method therefor
- Patent Title (中): 磁传感器及其制造方法
-
Application No.: US10584666Application Date: 2006-03-15
-
Publication No.: US08178361B2Publication Date: 2012-05-15
- Inventor: Hiroshi Naito , Hideki Sato , Yukio Wakui , Masayoshi Omura
- Applicant: Hiroshi Naito , Hideki Sato , Yukio Wakui , Masayoshi Omura
- Applicant Address: JP Hamamatsu-Shi, Shizuoka-ken
- Assignee: Yamaha Corporation
- Current Assignee: Yamaha Corporation
- Current Assignee Address: JP Hamamatsu-Shi, Shizuoka-ken
- Agency: Dickstein Shapiro LLP
- Priority: JP2005-077010 20050317; JP2005-088828 20050325; JP2005-091616 20050328; JP2005-091617 20050328; JP2005-098498 20050330; JP2005-131857 20050428; JP2005-350487 20051205
- International Application: PCT/JP2006/305131 WO 20060315
- International Announcement: WO2006/098367 WO 20060921
- Main IPC: H01L21/00
- IPC: H01L21/00 ; G01R33/09

Abstract:
There is provided a small-size magnetic sensor for detecting the intensity of a magnetic field in three axial directions, in which a plurality of giant magnetoresistive elements are formed on a single semiconductor substrate. A thick film is formed on the semiconductor substrate; giant magnetoresistive elements forming an X-axis sensor and a Y-axis sensor are formed on a planar surface thereof; and giant magnetoresistive elements forming a Z-axis sensor are formed using slopes of channels formed in the thick film. Regarding the channel formation, it is possible to use the reactive ion etching and high-density plasma CVD methods. In addition, an insulating film is formed between the thick film and passivation film and is used as an etching stopper. Each of the slopes of the channels can be constituted of a first slope and a second slope, so that a magneto-sensitive element is formed on the second slope having a larger inclination angle. In order to optimize the slope shape and inclination with respect to each channel, it is possible to form a dummy slope that does not directly relate to the formation of the giant magnetoresistive elements.
Public/Granted literature
- US20080169807A1 Magnetic Sensor and Manufacturing Method Therefor Public/Granted day:2008-07-17
Information query
IPC分类: