Invention Grant
- Patent Title: Method for production of a plurality of semiconductor chips, and a semiconductor component
- Patent Title (中): 用于制造多个半导体芯片的方法以及半导体部件
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Application No.: US11541132Application Date: 2006-09-28
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Publication No.: US08178372B2Publication Date: 2012-05-15
- Inventor: Stephan Lutgen , Tony Albrecht , Wolfgang Reill
- Applicant: Stephan Lutgen , Tony Albrecht , Wolfgang Reill
- Applicant Address: DE Regensburg
- Assignee: OSRAM Opto Semiconductors GmbH
- Current Assignee: OSRAM Opto Semiconductors GmbH
- Current Assignee Address: DE Regensburg
- Agency: Cozen O'Connor
- Priority: DE102005047065 20050930; DE102005053274 20051130
- Main IPC: H01L21/78
- IPC: H01L21/78

Abstract:
A method for production of a plurality of semiconductor chips (6) in a wafer composite. A semiconductor layer sequence (2) is grown on a growth substrate (1), metallization (3) is applied to the semiconductor layer sequence (2), a metal layer (4) is electrochemically deposited onto the metallization (3), and the semiconductor layer sequence (2) is then structured and separated to form individual semiconductor chips (6). The electrochemically applied metal layer (4) is particularly suitable for use as a heat spreader, for dissipation of the heat produced by the semiconductor chips (6).
Public/Granted literature
- US20100124246A1 METHOD FOR PRODUCTION OF A PLURALITY OF SEMICODUCTOR CHIPS, AND A SEMICONDUCTOR COMPONENT Public/Granted day:2010-05-20
Information query
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