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US08178372B2 Method for production of a plurality of semiconductor chips, and a semiconductor component 有权
用于制造多个半导体芯片的方法以及半导体部件

Method for production of a plurality of semiconductor chips, and a semiconductor component
Abstract:
A method for production of a plurality of semiconductor chips (6) in a wafer composite. A semiconductor layer sequence (2) is grown on a growth substrate (1), metallization (3) is applied to the semiconductor layer sequence (2), a metal layer (4) is electrochemically deposited onto the metallization (3), and the semiconductor layer sequence (2) is then structured and separated to form individual semiconductor chips (6). The electrochemically applied metal layer (4) is particularly suitable for use as a heat spreader, for dissipation of the heat produced by the semiconductor chips (6).
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