Invention Grant
US08178408B2 Methods of manufacturing charge trap-type non-volatile memory devices
有权
制造电荷陷阱型非易失性存储器件的方法
- Patent Title: Methods of manufacturing charge trap-type non-volatile memory devices
- Patent Title (中): 制造电荷陷阱型非易失性存储器件的方法
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Application No.: US12651781Application Date: 2010-01-04
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Publication No.: US08178408B2Publication Date: 2012-05-15
- Inventor: Hak-Sun Lee , Kyoung-Sub Shin , Jeong-Dong Choe
- Applicant: Hak-Sun Lee , Kyoung-Sub Shin , Jeong-Dong Choe
- Applicant Address: KR
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR
- Agency: Myers Bigel Sibley & Sajovec, P.A.
- Priority: KR10-2009-0000437 20090105
- Main IPC: H01L21/336
- IPC: H01L21/336 ; H01L21/3205

Abstract:
Some methods are directed to manufacturing charge trap-type non-volatile memory devices. An isolation layer pattern can be formed that extends in a first direction in a substrate. A recess unit is formed in the substrate by recessing an exposed surface of the substrate adjacent to the isolation layer pattern. A tunnel insulating layer and a charge trap layer are sequentially formed on the substrate. The tunnel insulating layer and the charge trap layer are patterned to form an isolated island-shaped tunnel insulating layer pattern and an isolated island-shaped charge trap layer pattern by etching defined regions of the substrate, the isolation layer pattern, the tunnel insulating layer, and the charge trap layer until a top surface of the charge trap layer that is disposed on a bottom surface of the recess unit is aligned with a top surface of the isolation layer pattern. A blocking insulating layer is formed that covers the charge trap layer pattern, the isolation layer pattern, and a defined region of the substrate interposed between the charge trap patterns. A gate electrode pattern is formed on the blocking insulating layer to face the charge trap layer pattern. This manufacturing process may reduce charge spreading between unit memory cells and/or may prevent/avoid reduction in the breakdown voltage of the blocking insulating layer.
Public/Granted literature
- US20100173469A1 METHODS OF MANUFACTURING CHARGE TRAP-TYPE NON-VOLATILE MEMORY DEVICES Public/Granted day:2010-07-08
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