Invention Grant
US08178411B2 Method for producing a stop zone in a semiconductor body and semiconductor component having a stop zone 有权
用于在半导体本体中制造阻挡区域的方法和具有停止区域的半导体部件

Method for producing a stop zone in a semiconductor body and semiconductor component having a stop zone
Abstract:
A method for producing a buried stop zone in a semiconductor body and a semiconductor component having a stop zone, the method including providing a semiconductor body having a first and a second side and a basic doping of a first conduction type. The method further includes irradiating the semiconductor body via one of the sides with protons, as a result of which protons are introduced into a first region of the semiconductor body situated at a distance from the irradiation side. The method also includes carrying out a thermal process in which the semiconductor body is heated to a predetermined temperature for a predetermined time duration, the temperature and the duration being chosen such that hydrogen-induced donors are generated both in the first region and in a second region adjacent to the first region in the direction of the irradiation side.
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