Invention Grant
- Patent Title: Alumina sintered body, method for manufacturing the same, and semiconductor manufacturing apparatus member
- Patent Title (中): 氧化铝烧结体及其制造方法以及半导体制造装置部件
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Application No.: US12722773Application Date: 2010-03-12
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Publication No.: US08178455B2Publication Date: 2012-05-15
- Inventor: Naomi Teratani , Toru Hayase , Yuji Katsuda , Masahiro Kida
- Applicant: Naomi Teratani , Toru Hayase , Yuji Katsuda , Masahiro Kida
- Applicant Address: JP Nagoya
- Assignee: NGK Insulatores, Ltd.
- Current Assignee: NGK Insulatores, Ltd.
- Current Assignee Address: JP Nagoya
- Agency: Burr & Brown
- Priority: JP2009-077266 20090326; JP2009-200753 20090831; JP2010-010001 20100120
- Main IPC: C04B35/10
- IPC: C04B35/10 ; C04B35/443

Abstract:
A method for manufacturing an alumina sintered body of the present invention comprises: (a) forming a mixed powder containing at least Al2O3 and MgF2 or a mixed powder containing Al2O3, MgF2, and MgO into a compact having a predetermined shape; and (b) performing hot-press sintering of the compact in a vacuum atmosphere or a non-oxidizing atmosphere to form an alumina sintered body, in which when a amount of MgF2 to 100 parts by weight of Al2O3 is represented by X (parts by weight), and a hot-press sintering temperature is represented by Y (° C.), the hot-press sintering temperature is set to satisfy the following equations (1) to (4) 1,120≦Y≦1,300 (1) 0.15≦X≦1.89 (2) Y≦−78.7X+1,349 (3) Y≧−200X+1,212 (4).
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