Invention Grant
- Patent Title: Non-volatile semiconductor storage device having memory cells disposed three-dimensionally, and method of manufacturing the same
- Patent Title (中): 具有三维配置存储单元的非易失性半导体存储装置及其制造方法
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Application No.: US12408249Application Date: 2009-03-20
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Publication No.: US08178917B2Publication Date: 2012-05-15
- Inventor: Hiroyasu Tanaka , Ryota Katsumata , Masaru Kito , Yoshiaki Fukuzumi , Masaru Kidoh , Yosuke Komori , Hideaki Aochi , Megumi Ishiduki , Yasuyuki Matsuoka
- Applicant: Hiroyasu Tanaka , Ryota Katsumata , Masaru Kito , Yoshiaki Fukuzumi , Masaru Kidoh , Yosuke Komori , Hideaki Aochi , Megumi Ishiduki , Yasuyuki Matsuoka
- Applicant Address: JP Tokyo
- Assignee: Kabushiki Kaisha Toshiba
- Current Assignee: Kabushiki Kaisha Toshiba
- Current Assignee Address: JP Tokyo
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2008-117508 20080428
- Main IPC: H01L29/792
- IPC: H01L29/792

Abstract:
A non-volatile semiconductor storage device includes a first layer and a second layer. The first layer includes: a plurality of first conductive layers extending in parallel to a substrate and laminated in a direction perpendicular to the substrate; a first insulation layer formed on an upper layer of the plurality of first conductive layers; a first semiconductor layer formed to penetrate the plurality of first conductive layers; and a charge accumulation layer formed between the first conductive layers and the first semiconductor layer. Respective ends of the first conductive layers are formed in a stepwise manner in relation to each other in a first direction. The second layer includes: a plurality of second conductive layers extending in parallel to the substrate and laminated in a direction perpendicular to the substrate, the second conductive layers being formed in the same layer as the plurality of first conductive layers; and a second insulation layer formed on an upper layer of the plurality of second conductive layers. Respective ends of the second conductive layers are formed to align along a straight line extending in a direction substantially perpendicular to the substrate at a predetermined area.
Public/Granted literature
- US20090267135A1 NON-VOLATILE SEMICONDUCTOR STORAGE DEVICE AND METHOD OF MANUFACTURING THE SAME Public/Granted day:2009-10-29
Information query
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