Invention Grant
- Patent Title: Charge trap type non-volatile memory device and method for fabricating the same
- Patent Title (中): 电荷阱型非易失性存储器件及其制造方法
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Application No.: US12432060Application Date: 2009-04-29
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Publication No.: US08178918B2Publication Date: 2012-05-15
- Inventor: Cha-Deok Dong
- Applicant: Cha-Deok Dong
- Applicant Address: KR Incheon-si, Gyeonggi-do
- Assignee: Hynix Semiconductor Inc.
- Current Assignee: Hynix Semiconductor Inc.
- Current Assignee Address: KR Incheon-si, Gyeonggi-do
- Agency: Lowe Hauptman Ham & Berner LLP
- Priority: KR10-2008-0074139 20080729
- Main IPC: H01L29/792
- IPC: H01L29/792

Abstract:
There is provided a charge trap type non-volatile memory device and a method for fabricating the same, the charge trap type non-volatile memory device including: a tunnel insulation layer formed over a substrate; a charge trap layer formed over the tunnel insulation layer, the charge trap layer including a charge trap polysilicon thin layer and a charge trap nitride-based layer; a charge barrier layer formed over the charge trap layer; a gate electrode formed over the charge barrier layer; and an oxide-based spacer formed over sidewalls of the charge trap layer and provided to isolate the charge trap layer.
Public/Granted literature
- US20100025752A1 CHARGE TRAP TYPE NON-VOLATILE MEMORY DEVICE AND METHOD FOR FABRICATING THE SAME Public/Granted day:2010-02-04
Information query
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