Invention Grant
US08178943B2 Electrical fuse, semiconductor device and method of disconnecting electrical fuse
失效
电气保险丝，半导体装置及断开电气保险丝的方法
- Patent Title: Electrical fuse, semiconductor device and method of disconnecting electrical fuse
- Patent Title (中): 电气保险丝，半导体装置及断开电气保险丝的方法
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Application No.: US12453053Application Date: 2009-04-28
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Publication No.: US08178943B2Publication Date: 2012-05-15
- Inventor: Yoshitaka Kubota
- Applicant: Yoshitaka Kubota
- Applicant Address: JP Kawasaki-shi, Kanagawa
- Assignee: Renesas Electronics Corporation
- Current Assignee: Renesas Electronics Corporation
- Current Assignee Address: JP Kawasaki-shi, Kanagawa
- Agency: McGinn Intellectual Property Law Group, PLLC
- Priority: JP2008-145769 20080603
- Main IPC: H01L23/52
- IPC: H01L23/52
Abstract:
An electrical fuse including a polysilicon layer; a silicide layer formed over the polysilicon layer; and a first metal contact and a second metal contact arranged over the silicide layer, while being spaced from each other, the electrical fuse being configured so that the silicide layer, after disconnection, is excluded from a region right under the second metal contact, and from a region between the second metal contact and the first metal contact is provided.
Public/Granted literature
- US20090231020A1 Electrical fuse, semiconductor device and method of disconnecting electrical fuse Public/Granted day:2009-09-17
Information query
IPC分类:
