Invention Grant
US08179023B2 Package-type piezoelectric resonator and method of manufacturing package-type piezoelectric resonator 失效
封装型压电谐振器及制造封装型压电谐振器的方法

  • Patent Title: Package-type piezoelectric resonator and method of manufacturing package-type piezoelectric resonator
  • Patent Title (中): 封装型压电谐振器及制造封装型压电谐振器的方法
  • Application No.: US12449533
    Application Date: 2008-02-19
  • Publication No.: US08179023B2
    Publication Date: 2012-05-15
  • Inventor: Takehiro Takahashi
  • Applicant: Takehiro Takahashi
  • Applicant Address: JP Tokyo
  • Assignee: Nihon Dempa Kogyo, Co., Ltd.
  • Current Assignee: Nihon Dempa Kogyo, Co., Ltd.
  • Current Assignee Address: JP Tokyo
  • Agency: Jordan and Hamburg LLP
  • Priority: JP2007-039760 20070220
  • International Application: PCT/JP2008/053126 WO 20080219
  • International Announcement: WO2008/102900 WO 20080828
  • Main IPC: H01L41/08
  • IPC: H01L41/08
Package-type piezoelectric resonator and method of manufacturing package-type piezoelectric resonator
Abstract:
Provided is a package-type piezoelectric sensor which can be packaged at a wafer stage and which is suitable for mass production. A package-type quartz resonator has lead electrodes that are interposed in a close contact state, between on one side stepped surfaces, and on another side a lower surface of a frame portion of a piezoelectric substrate. The close contact state is maintained when a base is joined to a lower surface side of the piezoelectric substrate. By joining a cover to an upper surface side of the piezoelectric substrate and joining the base to the lower surface side of the piezoelectric substrate, the piezoelectric substrate may be easily sealed to be airtight. In particular, a space in a recessed portion of the base is sealed airtight. This enables avoidance of complications in the manufacturing process.
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