Invention Grant
- Patent Title: Fixed wavelength absolute distance interferometer
- Patent Title (中): 固定波长绝对距离干涉仪
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Application No.: US12854784Application Date: 2010-08-11
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Publication No.: US08179534B2Publication Date: 2012-05-15
- Inventor: David William Sesko , Joseph Daniel Tobiason
- Applicant: David William Sesko , Joseph Daniel Tobiason
- Applicant Address: JP Kawasaki-shi
- Assignee: Mitutoyo Corporation
- Current Assignee: Mitutoyo Corporation
- Current Assignee Address: JP Kawasaki-shi
- Agency: Christensen O'Connor Johnson Kindness PLLC
- Main IPC: G01B11/02
- IPC: G01B11/02

Abstract:
A fixed wavelength absolute distance interferometer including a first interferometer comprising a first light source transmitting a first light beam having a wavelength W toward a measurement target, a wavefront radius detector configured to provide a first measurement responsive to the wavefront radius at the wavefront radius detector, and a first path length calculating portion calculating a coarse resolution absolute path length measurement R; and a second interferometer comprising a beam transmitting device transmitting a second-interferometer light beam having a wavelength Λ, a beam splitting/combining device separating the second-interferometer light beam into reference and measurement beams and combining the returning reference and measurement beams into a combined beam, a second-interferometer detector configured to receive the combined beam and provide signals of a phase φ of the combined beam, and a second path length calculating portion configured to determine a medium resolution absolute path length measurement ZM.
Public/Granted literature
- US20120038930A1 FIXED WAVELENGTH ABSOLUTE DISTANCE INTERFEROMETER Public/Granted day:2012-02-16
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