Invention Grant
- Patent Title: Micromechanical component having a swiveling part and method for producing same
- Patent Title (中): 具有旋转部件的微机械部件及其制造方法
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Application No.: US12735440Application Date: 2008-11-21
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Publication No.: US08179584B2Publication Date: 2012-05-15
- Inventor: Stefan Pinter , Joachim Fritz
- Applicant: Stefan Pinter , Joachim Fritz
- Applicant Address: DE Stuttgart
- Assignee: Robert Bosch GmbH
- Current Assignee: Robert Bosch GmbH
- Current Assignee Address: DE Stuttgart
- Agency: Kenyon & Kenyon LLP
- Priority: DE102008007345 20080204
- International Application: PCT/EP2008/065998 WO 20081121
- International Announcement: WO2009/097924 WO 20090813
- Main IPC: G02B26/08
- IPC: G02B26/08 ; G02B26/10

Abstract:
A micromechanical component having a base part, a swiveling part, which has an electrically conductive material, and a swiveling part insulation which electrically insulates a first and a second section of the swiveling part from each other. A first flexible, electrically conductive connecting element connects the base part to the first swiveling part section, and a second flexible, electrically conductive connecting element connects the base part to the second swiveling part section. A method also created for producing a micromechanical component includes the following steps: providing a substrate wafer that has a conductive overlayer, etching an insulation trench into the overlayer that insulates a first and second section of the overlayer from each other, as well as forming a base part and a swiveling part including the first and the second section of the overlayer from the substrate wafer, while allowing to remain a first flexible, electrically conductive connecting element, which connects the base part to the first swiveling part section, and allowing to remain a second flexible connecting element which connects the base part to the second swiveling part section.
Public/Granted literature
- US20110007376A1 MICROMECHANICAL COMPONENT AND METHOD FOR PRODUCING SAME Public/Granted day:2011-01-13
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