Invention Grant
US08179584B2 Micromechanical component having a swiveling part and method for producing same 有权
具有旋转部件的微机械部件及其制造方法

  • Patent Title: Micromechanical component having a swiveling part and method for producing same
  • Patent Title (中): 具有旋转部件的微机械部件及其制造方法
  • Application No.: US12735440
    Application Date: 2008-11-21
  • Publication No.: US08179584B2
    Publication Date: 2012-05-15
  • Inventor: Stefan PinterJoachim Fritz
  • Applicant: Stefan PinterJoachim Fritz
  • Applicant Address: DE Stuttgart
  • Assignee: Robert Bosch GmbH
  • Current Assignee: Robert Bosch GmbH
  • Current Assignee Address: DE Stuttgart
  • Agency: Kenyon & Kenyon LLP
  • Priority: DE102008007345 20080204
  • International Application: PCT/EP2008/065998 WO 20081121
  • International Announcement: WO2009/097924 WO 20090813
  • Main IPC: G02B26/08
  • IPC: G02B26/08 G02B26/10
Micromechanical component having a swiveling part and method for producing same
Abstract:
A micromechanical component having a base part, a swiveling part, which has an electrically conductive material, and a swiveling part insulation which electrically insulates a first and a second section of the swiveling part from each other. A first flexible, electrically conductive connecting element connects the base part to the first swiveling part section, and a second flexible, electrically conductive connecting element connects the base part to the second swiveling part section. A method also created for producing a micromechanical component includes the following steps: providing a substrate wafer that has a conductive overlayer, etching an insulation trench into the overlayer that insulates a first and second section of the overlayer from each other, as well as forming a base part and a swiveling part including the first and the second section of the overlayer from the substrate wafer, while allowing to remain a first flexible, electrically conductive connecting element, which connects the base part to the first swiveling part section, and allowing to remain a second flexible connecting element which connects the base part to the second swiveling part section.
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