Invention Grant
- Patent Title: Fixed jig, chip pickup method and chip pickup apparatus
- Patent Title (中): 固定夹具,芯片拾取方法和芯片拾取装置
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Application No.: US12445697Application Date: 2007-10-12
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Publication No.: US08182649B2Publication Date: 2012-05-22
- Inventor: Kenichi Watanabe , Takeshi Segawa , Hironobu Fujimoto
- Applicant: Kenichi Watanabe , Takeshi Segawa , Hironobu Fujimoto
- Applicant Address: JP Tokyo
- Assignee: Lintec Corporation
- Current Assignee: Lintec Corporation
- Current Assignee Address: JP Tokyo
- Agency: The Webb Law Firm
- Priority: JP2006-283984 20061018
- International Application: PCT/JP2007/070010 WO 20071012
- International Announcement: WO2008/047732 WO 20080424
- Main IPC: B32B38/10
- IPC: B32B38/10

Abstract:
It is an object to provide a fixing jig which can unmovably suction a chip group produced by segmenting a semiconductor wafer into pieces, and can suction one chip by detaching the chip selectively and reliably from the chip group. A fixing jig 3 is composed of a jig base 30 and an contact layer 31. A concave part 2 is formed on one side of the jig base 30. The concave part 2 is sectioned into small chambers 15 by a partition 12 having a height almost equivalent to that of a sidewall 35. The contact layer 31 is disposed on the upper edge of the sidewall 35 and the partition 12 for covering the concave part 2. A through hole 17 that is communicated with the outside is formed in each small chamber 15.
Public/Granted literature
- US20100314894A1 Fixed Jig, Chip Pickup Method and Chip Pickup Apparatus Public/Granted day:2010-12-16
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