Invention Grant
- Patent Title: Microfabricated fluid dynamic bearing
- Patent Title (中): 微型流体动力轴承
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Application No.: US12473243Application Date: 2009-05-27
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Publication No.: US08192087B2Publication Date: 2012-06-05
- Inventor: Roger L. Hipwell, Jr. , Alan L. Grantz , Dadi Setiadi , Yang Li
- Applicant: Roger L. Hipwell, Jr. , Alan L. Grantz , Dadi Setiadi , Yang Li
- Applicant Address: US CA Scotts Valley
- Assignee: Seagate Technology LLC
- Current Assignee: Seagate Technology LLC
- Current Assignee Address: US CA Scotts Valley
- Main IPC: F16C32/06
- IPC: F16C32/06

Abstract:
A fluid dynamic bearing formed by a microelectromechanical systems (MEMS) wafer-level batch-fabrication process is provided. The process results in a high performance and high reliability fluid dynamic bearing having features including higher bearing lifetime at high RPM, improved bearing stiffness, durability and thrust/restoring forces capabilities. The present invention is especially useful with small form factor disc drive memory devices having constraints in motor height, such as a 2.5 inch disc drive, requiring high performance including high rotational speed and large areal density. A sacrificial layer is utilized in the process to simultaneously form symmetrical facing surfaces of relatively rotatable components. The facing surfaces define, therebetween, a desired feature, such as a journal bearing, a thrust bearing, a fluid channel, a fluid reservoir, a capillary seal, pressure generating grooves, and other profile geometries. Such geometry control allows for design freedom in obtaining a desired bearing performance and stiffness.
Public/Granted literature
- US20100303393A1 Microfabricated Fluid Dynamic Bearing Public/Granted day:2010-12-02
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