Invention Grant
- Patent Title: Transfer chamber for a vacuum processing apparatus, and a vacuum processing apparatus
- Patent Title (中): 用于真空处理设备的转移室和真空处理设备
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Application No.: US12324244Application Date: 2008-11-26
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Publication No.: US08192132B2Publication Date: 2012-06-05
- Inventor: Jochen Krause , Michael Hofmann
- Applicant: Jochen Krause , Michael Hofmann
- Applicant Address: DE Dresden
- Assignee: VON ARDENNE Anlagentechnik GmbH
- Current Assignee: VON ARDENNE Anlagentechnik GmbH
- Current Assignee Address: DE Dresden
- Agency: Heslin Rothenberg Farley & Mesiti P.C.
- Priority: DE102007058052 20071130
- Main IPC: B65G49/07
- IPC: B65G49/07

Abstract:
In a transfer chamber having a housing with a transfer region and a passing band region, a transport device comprising a first arrangement of transport rollers is arranged in the transfer region of the housing, and a passing band comprising a second arrangement of transport rollers is arranged in the passing band region of the housing. The passing band region of the housing is subdivided by a horizontal wall, which is arranged above the passing band, into a transport space, which is located below the horizontal wall, and a pump space, which is located above the horizontal wall. The pump space has a vacuum port or a vacuum pump connected to it.
Public/Granted literature
- US20090142165A1 TRANSFER CHAMBER FOR A VACUUM PROCESSING APPARATUS, AND A VACUUM PROCESSING APPARATUS Public/Granted day:2009-06-04
Information query
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