Invention Grant
US08192132B2 Transfer chamber for a vacuum processing apparatus, and a vacuum processing apparatus 有权
用于真空处理设备的转移室和真空处理设备

Transfer chamber for a vacuum processing apparatus, and a vacuum processing apparatus
Abstract:
In a transfer chamber having a housing with a transfer region and a passing band region, a transport device comprising a first arrangement of transport rollers is arranged in the transfer region of the housing, and a passing band comprising a second arrangement of transport rollers is arranged in the passing band region of the housing. The passing band region of the housing is subdivided by a horizontal wall, which is arranged above the passing band, into a transport space, which is located below the horizontal wall, and a pump space, which is located above the horizontal wall. The pump space has a vacuum port or a vacuum pump connected to it.
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