Invention Grant
- Patent Title: Non-chemical, non-optical edge bead removal process
- Patent Title (中): 非化学，非光学边缘珠粒去除工艺
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Application No.: US10335279Application Date: 2002-12-31
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Publication No.: US08192555B2Publication Date: 2012-06-05
- Inventor: Peter A. Benson
- Applicant: Peter A. Benson
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: Whyte Hirschboeck Dudek SC
- Main IPC: B08B3/00
- IPC: B08B3/00 ; B08B7/00
Abstract:
A method for removing the edge bead from a substrate by applying an impinging stream of a medium that is not a solvent for the material to be removed. The medium is applied to the periphery of the substrate with sufficient force to remove the material. Also an apparatus to perform the inventive method.
Public/Granted literature
- US20040126923A1 Non-chemical, non-optical edge bead removal process Public/Granted day:2004-07-01
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