Invention Grant
- Patent Title: Coating apparatus
- Patent Title (中): 涂装设备
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Application No.: US12293880Application Date: 2007-03-14
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Publication No.: US08192597B2Publication Date: 2012-06-05
- Inventor: Erik Dekempeneer , Wilmert De Bosscher , Pascal Verheyen
- Applicant: Erik Dekempeneer , Wilmert De Bosscher , Pascal Verheyen
- Applicant Address: BE Zwevegem
- Assignee: NV Bekaert SA
- Current Assignee: NV Bekaert SA
- Current Assignee Address: BE Zwevegem
- Agency: Foley & Lardner LLP
- Priority: EP06111845 20060328
- International Application: PCT/EP2007/052375 WO 20070314
- International Announcement: WO2007/110323 WO 20071004
- Main IPC: C23C14/35
- IPC: C23C14/35

Abstract:
A coating apparatus (100) for batch coating of substrates is presented. In the batch coater layers of a stack can be deposited by means of physical vapor deposition, by means of chemical vapor deposition or by a mixture of both processes. When compared to previous apparatus, the mixed mode process is particularly stable. This is achieved by using a rotatable magnetron (112) rather than the prior-art planar magnetrons. The apparatus is further equipped with a rotatable shutter that allows for concurrent or alternating process steps.
Public/Granted literature
- US20090130336A1 COATING APPARATUS Public/Granted day:2009-05-21
Information query
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