Invention Grant
US08192598B2 End-block for a magnetron device with a rotatable target, and vacuum coating apparatus 有权
具有可旋转靶的磁控管装置的端块和真空镀膜装置

End-block for a magnetron device with a rotatable target, and vacuum coating apparatus
Abstract:
An end block for a magnetron device having a rotatable target comprises an end block housing having a pivot bearing. The end block housing is adapted on its outer side for attachment on a support unit, and the pivot bearing is adapted on an end that is accessible from outside the end block housing, for connection to the rotatable target. The end block housing is movably attached on the support unit. A vacuum coating apparatus has a vacuum chamber, a magnetron device situated in the vacuum chamber, and a rotatable target rotatably mounted on at least one such end block.
Information query
Patent Agency Ranking
0/0