Invention Grant
- Patent Title: Metrology methods and apparatus for nanomaterial characterization of energy storage electrode structures
- Patent Title (中): 储能电极结构纳米材料表征的计量方法和装置
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Application No.: US12368105Application Date: 2009-02-09
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Publication No.: US08192605B2Publication Date: 2012-06-05
- Inventor: Sergey D. Lopatin , Dmitri A. Brevnov , Eric Casavant , Robert Z. Bachrach
- Applicant: Sergey D. Lopatin , Dmitri A. Brevnov , Eric Casavant , Robert Z. Bachrach
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Patterson & Sheridan, LLP
- Main IPC: H01M4/02
- IPC: H01M4/02

Abstract:
Embodiments described herein generally relate to methods and apparatus for forming an electrode structure used in an energy storage device. More particularly, embodiments described herein relate to methods and apparatus for characterizing nanomaterials used in forming high capacity electrode structures for energy storage devices. In one embodiment a process for forming an electrode structure for an energy storage device is provided. The process comprises depositing a columnar metal structure over a substrate at a first current density by a diffusion limited deposition process, measuring a capacitance of the columnar metal structure to determine a surface area of the columnar metal structure, and depositing three dimensional porous metal structures over the columnar metal structure at a second current density greater than the first current density.
Public/Granted literature
- US20100200403A1 METROLOGY METHODS AND APPARATUS FOR NANOMATERIAL CHARACTERIZATION OF ENERGY STORAGE ELECTRODE STRUCTURES Public/Granted day:2010-08-12
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