Invention Grant
US08192914B2 Resist composition for immersion exposure and method of forming resist pattern
有权
用于浸渍曝光的抗蚀剂组合物和形成抗蚀剂图案的方法
- Patent Title: Resist composition for immersion exposure and method of forming resist pattern
- Patent Title (中): 用于浸渍曝光的抗蚀剂组合物和形成抗蚀剂图案的方法
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Application No.: US12094399Application Date: 2006-12-08
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Publication No.: US08192914B2Publication Date: 2012-06-05
- Inventor: Makiko Irie
- Applicant: Makiko Irie
- Applicant Address: JP Kawasaki-shi
- Assignee: Tokyo Ohka Kogyo Co., Ltd.
- Current Assignee: Tokyo Ohka Kogyo Co., Ltd.
- Current Assignee Address: JP Kawasaki-shi
- Agency: Knobbe Martens Olson & Bear LLP
- Priority: JP2005-357493 20051212; JP2006-006013 20060113
- International Application: PCT/JP2006/324573 WO 20061208
- International Announcement: WO2007/069548 WO 20070621
- Main IPC: G03F7/039
- IPC: G03F7/039 ; G03F7/20 ; G03F7/30

Abstract:
A resist composition for immersion exposure and a method of forming a resist pattern are provided which can satisfy both of excellent resistance to an immersion medium and lithography properties. The resist composition for immersion exposure includes a resin component (A) which exhibits changed alkali solubility under action of acid and an acid-generator component (B) which generates acid upon irradiation, the resin component (A) including a resin (A1) which contains a fluorine atom and a resin (A2) which has a structural unit (a′) derived from acrylic acid and contains no fluorine atom, and the amount of the resin (A1) contained in the resin component (A) being within the range from 0.1 to 50% by weight.
Public/Granted literature
- US20090053650A1 RESIST COMPOSITION FOR IMMERSION EXPOSURE AND METHOD OF FORMING RESIST PATTERN Public/Granted day:2009-02-26
Information query
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